太阳能电池生产线pecvd设备三维建模与仿真优化

-ii- 

3.2.3 

ANSYS

应用软件介绍

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3.3

PECVD

设备的有限元模型和计算

·

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3.3.1

 ANSYS

中模型的建立与网格化

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3.3.2 

极板的有限元分析

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3.3.3 

侧板的有限元分析

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3.3.4 

下支架桥的有限元分析

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3.4

小结

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第四章 

PECVD

设备送料机构创新设计

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4.1

引言

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4.2

机械创新设计方法简介

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4.3

送料机构的创新设计

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4.3.1 

设计的基本思想

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4.3.2 

建立机构零件三维模型

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4.3.3 

将零件装配成整体并进行仿真分析

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4.4

小结

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第五章 

结论和展望

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5.1

结论

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5.2

展望

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参考文献

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发表论文和科研情况说明

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致

谢

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