太阳能电池生产线pecvd设备三维建模与仿真优化

太阳能电池生产线pecvd设备三维建模与仿真优化

 

-ii- 

3.2.3 

ANSYS

应用软件介绍

·

··············································· 

24

 

3.3

 

 

PECVD

设备的有限元模型和计算

 

·

····································· 29

 

3.3.1

 ANSYS

中模型的建立与网格化

 ···································· 29

 

3.3.2 

极板的有限元分析

 ··················································· 38

 

3.3.3 

侧板的有限元分析

 ··················································· 42

 

3.3.4 

下支架桥的有限元分析

 ············································· 45

 

3.4

 

小结

 ············································································ 48

 

第四章 

PECVD

设备送料机构创新设计

 ················································ 

49

 

4.1

 

引言

 ············································································ 49

 

4.2

 

机械创新设计方法简介

 ···················································· 49

 

4.3

 

送料机构的创新设计

 ······················································· 50

 

4.3.1 

设计的基本思想

 ······················································ 50

 

4.3.2 

建立机构零件三维模型

 ············································· 50

 

4.3.3 

将零件装配成整体并进行仿真分析

······························· 52

 

4.4

 

小结

 ············································································ 55

 

第五章 

结论和展望

 ··············································································· 

56

 

5.1

 

结论

 ············································································ 56

 

5.2

 

展望

 ············································································ 56

 

参考文献

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57

 

发表论文和科研情况说明

 ········································································ 

59

 

 

 

 

 

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60

 

 

 


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